Ordered Structure in Buried Oxide Layers of SOI Wafers

Japanese Journal of Applied Physics 1999 / 01 Vol. 38; Iss. S1

Ordered Structure in Buried Oxide Layers of SOI Wafers

Shimura, Takayoshi, Hosoi, Takuji, Ejiri, Riho, Umeno, Masataka
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Volume:
38
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAPS.38S1.297
Date:
January, 1999
File:
PDF, 995 KB
1999
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