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Foundations of Low-Temperature Plasma Enhanced Materials Synthesis and Etching
Oehrlein, Gottlieb S, Hamaguchi, SatoshiLanguage:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/1361-6595/aaa86c
Date:
January, 2018
File:
PDF, 856 KB
english, 2018