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PDMS–PMMA bonding improvement using SiO2 intermediate layer and its application in fabricating gas micro valves
Norouzi, Ahmad R., Nikfarjam, Alireza, Hajghassem, HassanLanguage:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-017-3676-2
Date:
January, 2018
File:
PDF, 3.08 MB
english, 2018