Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2017 / 11 Vol. 35; Iss. 6
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Tip-to-tip variation mitigation in extreme ultraviolet lithography for 7 nm and beyond metallization layers and design rule analysis
Chen, Yulu, Sun, Lei, Qi, Zhengqing John, Zhao, Shuo, Goodwin, Francis, Matthew, Itty, Plachecki, VinceVolume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4994908
Date:
November, 2017
File:
PDF, 2.84 MB
english, 2017