[IEEE 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Kaohsiung (2017.6.18-2017.6.22)] 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - High-K thin films for simultaneous dielectric actuation and detection of M/NEMS flexural vibration
Fuinel, Cecile, Mathieu, Fabrice, Laborde, Adrian, Mazenq, Laurent, Bergaud, Christian, Legrand, BernardYear:
2017
Language:
english
DOI:
10.1109/transducers.2017.7994155
File:
PDF, 1.29 MB
english, 2017