[ASME ASME 2005 International Mechanical Engineering Congress and Exposition - Orlando, Florida, USA (November 5 – 11, 2005)] Microelectromechanical Systems - Design and Fabrication of 2D Phononic Crystals in Surface Acoustic Wave Micro Devices
Gu, Kebin, Chang, Chien-Liu, Shieh, Jyh-CherngVolume:
2005
Year:
2005
Language:
english
DOI:
10.1115/imece2005-82692
File:
PDF, 253 KB
english, 2005