Effects of SF 6 plasma treatment on the properties of InGaZnO thin films
Choi, Jinsung, Bae, Byung Seong, Yun, Eui-JungVolume:
57
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.57.03DA01
Date:
March, 2018
File:
PDF, 1.31 MB
english, 2018