Experimental and numerical investigations of electron characteristics in 2 MHz and 13.56 MHz inductively coupled hydrogen plasmas with an expansion region
Gao, Fei, Li, Hong, Yang, Wei, Liu, Jia, Zhang, Yu-Ru, Wang, You-NianVolume:
25
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.5006892
Date:
January, 2018
File:
PDF, 1.57 MB
english, 2018