Properties of Thermally Grown Silicon Nitride Films

Journal of the Physical Society of Japan 1967 / 09 Vol. 23; Iss. 3

Properties of Thermally Grown Silicon Nitride Films

Okada, Kazuo, Sakane, Hideo, Sugioka, Yasoichi
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Volume:
23
Journal:
Journal of the Physical Society of Japan
DOI:
10.1143/JPSJ.23.655
Date:
September, 1967
File:
PDF, 239 KB
1967
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