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Thin Solid Films 2018 / 1

Inherently area-selective hot-wire assisted atomic layer deposition of tungsten films

Yang, Mengdi, Aarnink, Antonius A.I., Schmitz, Jurriaan, Kovalgin, Alexey Y.
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Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2018.01.016
Date:
January, 2018
File:
PDF, 7.77 MB
english, 2018
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