Plasma CVD of hydrogenated boron-carbon thin films from...

The Journal of Chemical Physics 2018 / 01 Vol. 148; Iss. 3

Plasma CVD of hydrogenated boron-carbon thin films from triethylboron

Imam, Mewlude, Höglund, Carina, Schmidt, Susann, Hall-Wilton, Richard, Birch, Jens, Pedersen, Henrik
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Volume:
148
Language:
english
Journal:
The Journal of Chemical Physics
DOI:
10.1063/1.5006886
Date:
January, 2018
File:
PDF, 1.72 MB
english, 2018
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