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Insulator-semiconductor interface fixed charges in AlGaN/GaN metal-insulator-semiconductor devices with Al 2 O 3 or AlTiO gate dielectrics
Le, Son Phuong, Nguyen, Duong Dai, Suzuki, Toshi-kazuVolume:
123
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.5017668
Date:
January, 2018
File:
PDF, 2.52 MB
english, 2018