Dependence of Nitrogen/Argon Reaction Gas Amount on...

Chinese Physics Letters 2017 / 12 Vol. 34; Iss. 12

Dependence of Nitrogen/Argon Reaction Gas Amount on Structural, Mechanical and Optical Properties of Thin WN x Films

Asgary, Somayeh, Ramezani, Amir Hoshang
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Volume:
34
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/34/12/126801
Date:
December, 2017
File:
PDF, 959 KB
english, 2017
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