Filling Angle and its Effect on Filling Process in...

Journal of Micromechanics and Microengineering 2018 / 01

Filling Angle and its Effect on Filling Process in Roll-to-Roll Ultraviolet Imprint Lithography

Wang, Jianping, Li, Mujun, Qiu, Jinfeng, Zhou, Youquan
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Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aaa77d
Date:
January, 2018
File:
PDF, 871 KB
english, 2018
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