Mechanism of high growth rate for diamond-like carbon films...

Plasma Science and Technology 2018 / 02 Vol. 20; Iss. 2

Mechanism of high growth rate for diamond-like carbon films synthesized by helicon wave plasma chemical vapor deposition

JI, Peiyu, YU, Jun, HUANG, Tianyuan, JIN, Chenggang, YANG, Yan, ZHUGE, Lanjian, WU, Xuemei
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Volume:
20
Language:
english
Journal:
Plasma Science and Technology
DOI:
10.1088/2058-6272/aa94bd
Date:
February, 2018
File:
PDF, 2.12 MB
english, 2018
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