Photo-Reconfigurable Azopolymer Etch Mask:...

Small 2018 / 01

Photo-Reconfigurable Azopolymer Etch Mask: Photofluidization-Driven Reconfiguration and Edge Rectangularization

Choi, Jaeho, Kang, Hong Suk, Jo, Wonhee, Kim, Shin-Hyun, Jung, Yeon Sik, Kim, Hee-Tak
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Language:
english
Journal:
Small
DOI:
10.1002/smll.201703250
Date:
January, 2018
File:
PDF, 1.56 MB
english, 2018
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