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Plasma emission spectroscopy and its relation to the...

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  • Plasma emission spectroscopy and its relation to the...

Plasma emission spectroscopy and its relation to the refractive index of silicon nitride thin films deposited by reactive magnetron sputtering

Sangines, Roberto, Abundiz-Cisneros, Noemi, Hernández-Utrera, Oscar, Diliegros-Godines, Carolina, Machorro-Mejía, Roberto
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Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/1361-6463/aaa8d4
Date:
January, 2018
File:
PDF, 1.34 MB
english, 2018
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