Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2018 / 01 Vol. 36; Iss. 1
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Experimental demonstration of evanescent-coupled antireflection coatings
Bourke, Levi, Blaikie, Richard J.Volume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.5001097
Date:
January, 2018
File:
PDF, 3.16 MB
english, 2018