164 nW Inverter-based capacitive readout IC for microaccelerometer
Ko, Youngwoon, Kim, Hyungseup, Mun, Yeongjin, Lee, Byeoncheol, Cho, Dong-il Dan, Ko, HyounghoLanguage:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-018-3707-7
Date:
January, 2018
File:
PDF, 1.07 MB
english, 2018