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Low temperature plasma enhanced deposition of GaP films on Si substrate
Gudovskikh, Alexander S., Morozov, Ivan A., Uvarov, Alexander V., Kudryashov, Dmitriy A., Nikitina, Ekaterina V., Bukatin, Anton S., Nevedomskiy, Vladimir N., Kleider, Jean-PaulVolume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4999409
Date:
March, 2018
File:
PDF, 2.27 MB
english, 2018