Low temperature plasma enhanced deposition of GaP films on...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2018 / 03 Vol. 36; Iss. 2

Low temperature plasma enhanced deposition of GaP films on Si substrate

Gudovskikh, Alexander S., Morozov, Ivan A., Uvarov, Alexander V., Kudryashov, Dmitriy A., Nikitina, Ekaterina V., Bukatin, Anton S., Nevedomskiy, Vladimir N., Kleider, Jean-Paul
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Volume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4999409
Date:
March, 2018
File:
PDF, 2.27 MB
english, 2018
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