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Characterization of particle generated during plasma-enhanced chemical vapor deposition on amorphous carbon layer using particle beam mass spectrometer
Kim, Dongbin, Kim, TaeWan, Park, Sang Hyun, Lim, Sung Kyu, Lee, Hyo-Chang, Kim, Taesung, Kang, Sang-WooVolume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.5000087
Date:
March, 2018
File:
PDF, 1.46 MB
english, 2018