Two-sided through-wafer interconnect for optical spiral delay line
Bykhovsky, Dima, Rosenblit, Michael, Arnon, ShlomiVolume:
65
Language:
english
Journal:
Journal of Modern Optics
DOI:
10.1080/09500340.2017.1377305
Date:
January, 2018
File:
PDF, 1.33 MB
english, 2018