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[IEEE 2017 Chinese Automation Congress (CAC) - Jinan, China (2017.10.20-2017.10.22)] 2017 Chinese Automation Congress (CAC) - FEM simulation of SAW temperature sensor based on Al/AlN/Si structure
Li, Yingge, Ma, Lianxiang, Zhang, Dian, Liu, XimeiYear:
2017
Language:
english
DOI:
10.1109/CAC.2017.8243987
File:
PDF, 341 KB
english, 2017