Oxidation Rate Reduction of Ge with O$_{2}$ Pressure...

Applied Physics Express 2012 / 11 Vol. 5; Iss. 11

Oxidation Rate Reduction of Ge with O$_{2}$ Pressure Increase

Lee, Choong Hyun, Tabata, Toshiyuki, Nishimura, Tomonori, Nagashio, Kosuke, Toriumi, Akira
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Volume:
5
Language:
english
Journal:
Applied Physics Express
DOI:
10.1143/APEX.5.114001
Date:
November, 2012
File:
PDF, 757 KB
english, 2012
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