Incorporating Yttrium into a GeO Interfacial Layer with...

ECS Journal of Solid State Science and Technology 2018 Vol. 7; Iss. 2

Incorporating Yttrium into a GeO Interfacial Layer with HfO 2 -Based Gate Stack on Ge

Chou, Chen-Han, Lu, Yu-Hong, Tsai, Yi-He, Shih, An-Shih, Yeh, Wen-Kuan, Chien, Chao-Hsin
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Volume:
7
Year:
2018
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0161802jss
File:
PDF, 920 KB
english, 2018
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