The influence of superimposed DC current on electrical and...

AIP Advances 2018 / 01 Vol. 8; Iss. 1

The influence of superimposed DC current on electrical and spectroscopic characteristics of HiPIMS discharge

Zuo, Xiao, Chen, Rende, Liu, Jingzhou, Ke, Peiling, Wang, Aiying
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Volume:
8
Language:
english
Journal:
AIP Advances
DOI:
10.1063/1.5018037
Date:
January, 2018
File:
PDF, 4.66 MB
english, 2018
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