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Influence of spokes on the Ionized Metal Flux Fraction in chromium High Power Impulse Magnetron Sputtering
Biskup, Beatrix, Maszl, Christian, Breilmann, Wolfgang, Held, Julian, Boeke, Marc, Benedikt, Jan, von Keudell, AchimLanguage:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/1361-6463/aaac15
Date:
January, 2018
File:
PDF, 4.00 MB
english, 2018