Influence of spokes on the Ionized Metal Flux Fraction in...

  • Main
  • 2018 / 01
  • Influence of spokes on the Ionized Metal Flux Fraction in...

Influence of spokes on the Ionized Metal Flux Fraction in chromium High Power Impulse Magnetron Sputtering

Biskup, Beatrix, Maszl, Christian, Breilmann, Wolfgang, Held, Julian, Boeke, Marc, Benedikt, Jan, von Keudell, Achim
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/1361-6463/aaac15
Date:
January, 2018
File:
PDF, 4.00 MB
english, 2018
Conversion to is in progress
Conversion to is failed