Investigation of gas flows in a radial-type reactor for GaAs epitaxy
K. I. Antonenko, A. A. Arendarenko, Yu. P. Rainova, I. N. Sorokin, S. M. TurilinVolume:
31
Language:
english
Pages:
6
DOI:
10.1007/bf02030111
Date:
November, 1996
File:
PDF, 705 KB
english, 1996