Fabrication of 3D air-core MEMS inductors for...

Microsystems & Nanoengineering 2018 / 1 Vol. 4

Fabrication of 3D air-core MEMS inductors for very-high-frequency power conversions

Le, Hoa Thanh, Mizushima, Io, Nour, Yasser, Tang, Peter Torben, Knott, Arnold, Ouyang, Ziwei, Jensen, Flemming, Han, Anpan
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Volume:
4
Language:
english
Journal:
Microsystems & Nanoengineering
DOI:
10.1038/micronano.2017.82
Date:
January, 2018
File:
PDF, 3.73 MB
english, 2018
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