Passivation of Poly-Si Thin Film Employing Si Self-Implantation and Its Application to TFTs
Chen, Rongsheng, Zhou, Wei, Deng, Sunbin, Zhang, Meng, Wong, Man, Kwok, Hoi SingVolume:
6
Year:
2018
Language:
english
Journal:
IEEE Journal of the Electron Devices Society
DOI:
10.1109/JEDS.2018.2796238
File:
PDF, 1.07 MB
english, 2018