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[IEEE 2017 Conference on Lasers and Electro-Optics - Pacific Rim (CLEO-PR) - Singapore (2017.7.31-2017.8.4)] 2017 Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR) - MOEMS accelerometer based on grating coupler integrated with embossed diaphragm
Balasubramanian, M, Nandi, Shreyas, Fathima, Shirin, Aparna, S, Vuppala, Sai Srujana, Poornalakshmi, U, Pattnaik, Prasant KumarYear:
2017
Language:
english
DOI:
10.1109/CLEOPR.2017.8118814
File:
PDF, 712 KB
english, 2017