[IEEE 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Kaohsiung (2017.6.18-2017.6.22)] 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Microscale systems based on ultrasonic MEMS — CMOS integration
Degertekin, F. LeventYear:
2017
Language:
english
DOI:
10.1109/TRANSDUCERS.2017.7994071
File:
PDF, 853 KB
english, 2017