[IEEE 2017 19th International Conference on Solid-State...

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[IEEE 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Kaohsiung (2017.6.18-2017.6.22)] 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Microscale systems based on ultrasonic MEMS — CMOS integration

Degertekin, F. Levent
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Year:
2017
Language:
english
DOI:
10.1109/TRANSDUCERS.2017.7994071
File:
PDF, 853 KB
english, 2017
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