[IEEE 2001 ICRA. IEEE International Conference on Robotics and Automation - Seoul, South Korea (21-26 May 2001)] Proceedings 2001 ICRA. IEEE International Conference on Robotics and Automation (Cat. No.01CH37164) - Micro-fluid device using thick layer piezoactuator prepared on Si micromachined structure
Sukhan Lee,, Jaewoo Chung,, Seungmo Lim,, Changseung Lee,Volume:
1
Year:
2001
Language:
english
DOI:
10.1109/robot.2001.932618
File:
PDF, 304 KB
english, 2001