Supersonic plasma outflow in a plasmochemical method of...

Journal of Physics Conference Series 2018 / 01 Vol. 944

Supersonic plasma outflow in a plasmochemical method of amorphous silicon thin films formation

Baranova, L V, Strunin, V I, Khudaibergenov, G Zh
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Volume:
944
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/944/1/012008
Date:
January, 2018
File:
PDF, 689 KB
english, 2018
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