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[IEEE 2017 IEEE International Electron Devices Meeting (IEDM) - San Francisco, CA, USA (2017.12.2-2017.12.6)] 2017 IEEE International Electron Devices Meeting (IEDM) - Continuing Moore's law with EUV lithography
Turkot, B., Carson, S., Lio, A.Year:
2017
Language:
english
DOI:
10.1109/IEDM.2017.8268390
File:
PDF, 405 KB
english, 2017