Formation of tungsten carbide films from tungsten hexafluoride.
CHONG, Yong-bo, WATANABE, Nobuatsu, TANAKA, NoriyukiVolume:
36
Year:
1985
Journal:
Journal of the Metal Finishing Society of Japan
DOI:
10.4139/sfj1950.36.340
File:
PDF, 983 KB
1985