Realization of a Composite MEMS Hydrophone Without...

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Sensors and Actuators A: Physical 2018 / 2

Realization of a Composite MEMS Hydrophone Without Left-right Ambiguity

Liu, Mengran, Nie, Lei, Zhang, Guojun, Zhang, Wendong, Zou, Jing
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Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2018.01.061
Date:
February, 2018
File:
PDF, 5.03 MB
english, 2018
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