Morphology control of conductive TiN films produced by air-based magnetron sputtering
Chuang, Kai-Ling, Tsai, Ming-Ting, Lu, Fu-HsingLanguage:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2018.02.020
Date:
February, 2018
File:
PDF, 9.63 MB
english, 2018