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Role of film thickness on the structural and optical properties of GaN on Si (100) grown by hollow-cathode plasma-assisted atomic layer deposition
Gungor, Nese, Alevli, MustafaVolume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.5003154
Date:
March, 2018
File:
PDF, 4.08 MB
english, 2018