Role of film thickness on the structural and optical...

Role of film thickness on the structural and optical properties of GaN on Si (100) grown by hollow-cathode plasma-assisted atomic layer deposition

Gungor, Nese, Alevli, Mustafa
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.5003154
Date:
March, 2018
File:
PDF, 4.08 MB
english, 2018
Conversion to is in progress
Conversion to is failed