Soft mold NanoImprint Lithography: a versatile tool for...

Microsystem Technologies 2018 / 2

Soft mold NanoImprint Lithography: a versatile tool for sub-wavelength grating applications

Pelloquin, S., Augé, S., Sharshavina, K., Doucet, J.-B., Héliot, A., Camon, H., Monmayrant, A., Gauthier-Lafaye, O.

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Language:

english

Journal:

Microsystem Technologies

DOI:

10.1007/s00542-018-3740-6

Date:

February, 2018

File:

PDF, 2.49 MB

english, 2018

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