Effect of ion energies on the film properties of titanium dioxides synthesized via plasma enhanced atomic layer deposition
Iwashita, Shinya, Moriya, Tsuyoshi, Kikuchi, Takamichi, Kagaya, Munehito, Noro, Naotaka, Hasegawa, Toshio, Uedono, AkiraVolume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.5001552
Date:
March, 2018
File:
PDF, 3.19 MB
english, 2018