![](/img/cover-not-exists.png)
Development of CMOS MEMS Inductive Type Tactile Sensor with the Integration of Chrome Steel Ball Force Interface
Yeh, Sheng-Kai, Chang, Heng-Chung, Fang, WeileunLanguage:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aaac24
Date:
January, 2018
File:
PDF, 1.29 MB
english, 2018