Electrical Contacts in SOI MEMS Using Aerosol Jet Printing

Electrical Contacts in SOI MEMS Using Aerosol Jet Printing

Khorramdel, Behnam, Torkkeli, Altti, Mantysalo, Matti
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Volume:
6
Language:
english
Journal:
IEEE Journal of the Electron Devices Society
DOI:
10.1109/JEDS.2017.2764498
Date:
December, 2018
File:
PDF, 1.19 MB
english, 2018
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