Electrical Contacts in SOI MEMS Using Aerosol Jet Printing
Khorramdel, Behnam, Torkkeli, Altti, Mantysalo, MattiVolume:
6
Language:
english
Journal:
IEEE Journal of the Electron Devices Society
DOI:
10.1109/JEDS.2017.2764498
Date:
December, 2018
File:
PDF, 1.19 MB
english, 2018