Synergetic effect for improved deposition of titanium...

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Surface and Coatings Technology 2018 / 2

Synergetic effect for improved deposition of titanium nitride films

Chang, Chi-Lung, Ho, Chun-Ta, Chen, Pin-Hung, Chen, Wei-Chih, Wang, Da-Yung, Wu, Wan-Yu
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Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2018.02.019
Date:
February, 2018
File:
PDF, 2.32 MB
english, 2018
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