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Electrical and Structural Characterization of Self-Aligned InGaZnO Thin-film Transistors Fabricated by Excimer Laser Irradiation
Nakata, Mitsuru, Tsuji, Hiroshi, Fujisaki, Yoshihide, Nakajima, Yoshiki, Takei, Tatsuya, Yamamoto, ToshihiroVolume:
53
Language:
english
Journal:
IEEE Transactions on Industry Applications
DOI:
10.1109/tia.2017.2726504
Date:
November, 2017
File:
PDF, 881 KB
english, 2017