Search for potential precursors for Si-atomic layer...

Materials Letters 2018 / 04 Vol. 216

Search for potential precursors for Si-atomic layer deposition – A quantum chemical study

Vajeeston, P., Fjellvåg, H., Nilsen, O.
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Volume:
216
Language:
english
Journal:
Materials Letters
DOI:
10.1016/j.matlet.2018.01.040
Date:
April, 2018
File:
PDF, 895 KB
english, 2018
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