Low emissivity double sides antireflection coatings for silicon wafer at infrared region
Dong, Chao, Lu, Hai, Yu, Kun, Shen, Ke-Sheng, Zhang, Jun, Xia, Shi-Qiang, Xiong, Zong-Gang, Liu, Xiao-Yu, Zhang, Bo, Wang, Zhi-Jun, Wu, Peng, Liu, Yu-Fang, Zhang, Xian-ZhouLanguage:
english
Journal:
Journal of Alloys and Compounds
DOI:
10.1016/j.jallcom.2018.01.384
Date:
February, 2018
File:
PDF, 2.28 MB
english, 2018