A low-g MEMS inertial switch with a novel radial electrode...

Sensors and Actuators A: Physical 2018 / 02 Vol. 270

A low-g MEMS inertial switch with a novel radial electrode for uniform omnidirectional sensitivity

Du, Liqun, Li, Yu, Zhao, Jian, Wang, Weitai, Zhao, Wenjun, Zhao, Wen, Zhu, Heqing
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Volume:
270
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2017.12.068
Date:
February, 2018
File:
PDF, 3.58 MB
english, 2018
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