Synthesis and characteristics of nc-WC/a-C:H thin films deposited via a reactive HIPIMS process using optical emission spectrometry feedback control
Chang, Chi-Lung, Yang, Fu-ChiLanguage:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2018.02.006
Date:
February, 2018
File:
PDF, 1.53 MB
english, 2018