Local sensor based on nanowire field effect transistor from inhomogeneously doped silicon on insulator
Presnov, Denis E., Bozhev, Ivan V., Miakonkikh, Andrew V., Simakin, Sergey G., Trifonov, Artem S., Krupenin, Vladimir A.Volume:
123
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.5019250
Date:
February, 2018
File:
PDF, 4.54 MB
english, 2018